ASM Epitaxy Tools

Solid State Disks Ltd

Dependable Data Storage Solutions

We have retrofit and upgrade solutions for ASM Epsilon 2000, Intrepid ES and Intrepid ESA Epitaxy tools.

The Epsilon® 2000 single-wafer epitaxy tool offers a wide variety of epitaxy applications for 150 and 200mm wafers. They range from high-temperature silicon for wafer preparation to low-temperature selective or non-selective silicon germanium (SiGe) for forming transistor strain layers. As for the Intrepid® ES™, it is ASM’s most advanced epitaxy deposition tool and is designed for the most critical 300mm applications for advanced transistors and memories.

We have developed retrofit and upgrade solutions – based on our CF2SCSI™ SCSIFlash™ – for the following systems: Epsilon E2000, E2000, E2500, E3000 and E3200 using OS9 operating system.

We have also retrofit and upgrade solutions for:

  • Seagate Technology’s ST34520N hard disk drive (using OS9)
  • IBM’s 720kb floppy disk drive using OS9

The benefits of using our CF2SCSI™ SCSIFlash™ in your epitaxy tool include:

  • Backup, restore and image editing software allows you to keep all recipes and message logs on a remote server, thus making browsing messages quick and allowing for unlimited recipe directories that can be loaded (in minutes) as required.
  • The exporting of screen captures and configurations can also be performed via hard disk and extracted from the image.
  • There’s no need to enter the clean room to backup or restore recipes, and you can eliminate the need for floppy disks.
  • Disk size can be set via software to optimize backup times.

Where to next?

Flash2GUI’s Recipe Editor

Our Flash2GUI network software includes a separately licenced module that replicates the functionality of the Recipe Editor component of the ASM Epsilon 2000 and 2500 systems. The module makes use of the Ethernet interface available on our FloppyFLASH emulators (floppy disk drive replacements) to enable recipes to be retrieved, viewed, edited and saved.

Our Recipe Editor has been tested on the following epitaxy software: AR E2, E2000 and E2000+ with software version 7.45 or higher.

Note: The Recipe Editor module needs access to the BBU_CONFIG file from the appropriate system. Currently, this must be a local file on the PC, created by using the Image Manager to extract the file from a backup of the SF2 on your Epsilon system.

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What is SCSIFlash™?

Our drive solves the growing and increasingly expensive problem of repairing or replacing ageing and failing SCSI-based 2.5-inch, 3.5-inch and 5.25-inch hard disk drives, magneto optical drives, quarter-inch tape drives and floppy disk drives on computer-based legacy equipment used in telecoms and other industries.

Combining proven SCSI drive architectures with industry-standard, solid-state Flash-based memory technology, our drives are drop-in replacement for any style of SCSI-based drive.

We have two families of products:

  • SCSIFlash™. The storage media used is Compact Flash (CF), up to 128GB capacity, and the SCSI interface (SASI, SCSI-1 and SCSI-2 architectures) is standard (narrow) 8-bit with data transfer rates of up to 10MB/s.
  • SCSIFlash-Fast™. The storage media used is either CFast or M.2 SSD, up to 1TB capacity, and the data transfer rate is up to 80MB/s. SASI, SCSI-1, SCSI-2 and Ultra3 are supported, and the interface is automatically detected as being standard/narrow (8-bit SCSI, wide (16-bit) SCSI, single-ended (SE) or low voltage different (LVD) signalling.

Our drives are completely programmable, enabling the SCSI driver implementation nuances of the original equipment to be fully emulated. This means you won’t have to make any changes to your system. Our drives are truly swap-in replacements.

For further information on SCSIFlash and SCSIFlash-Fast, and to access data sheets, please visit here:

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